Design and fabrication of a micromachined electrostatically suspended gyroscope
The current paper describes the design and fabrication of a micromachined electrostatically suspended gyroscope. Electrostatic levitation is employed to suspend the rotor, eliminating the mechanical bearing and thus friction effects between the rotor and the substrate, hence improving long-term stab...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2008.
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| Subjects: | |
| Online Access: | Get fulltext |