Fabrication of MEMS components using ultra fine grained aluminium
A novel process for the fabrication of a microelectromechanical systems (MEMS) metallic component with features smaller than 10 µm and high thermal conductivity was investigated. This may be applied to new or improved microscale components, such as (micro-) heat exchangers. In the first stage of pro...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2010.
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| Subjects: | |
| Online Access: | Get fulltext |