Fabrication of submicrometer high refractive index tantalum pentoxide waveguides for optical propulsion of microparticles
Design, fabrication, and optimization of tantalum pentoxide (Ta<sub>2</sub>O<sub>5</sub>) waveguides to obtain low-loss guidance at a wavelength of 1070 nm are reported. The high-refractive index contrast (Δn ~ 0.65, compared to silicon oxide) of Ta<sub>2</sub>O&l...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2009.
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| Subjects: | |
| Online Access: | Get fulltext |