Focused helium ion beam milling and deposition
The use of a helium ion microscope with an integrated gas injection system for nanofabrication is explored by demonstrating the milling of fine features into single layered graphene and the controlled deposition of tungsten and platinum wires from gaseous precursors. Using pattern generator software...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2011-08.
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| Subjects: | |
| Online Access: | Get fulltext |