Nanoimprint lithography for planar chiral photonic meta-materials

Room temperature nanoimprint lithography has successfully been applied to the fabrication of planar chiral photonic meta-materials. For dielectric chiral structures a single layer of thick HSQ was used while for metallic chiral structures a bi-layer technique using PMMA/hydrogen silsequioxane (HSQ)...

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Bibliographic Details
Main Authors: Chen, Yifang (Author), Tao, Jiarui (Author), Zhao, Xinghong (Author), Cui, Zheng (Author), Schwanecke, Alexander S. (Author), Zheludev, Nikolay I. (Author)
Format: Article
Language:English
Published: 2005-01-11.
Subjects:
Online Access:Get fulltext
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100 1 0 |a Chen, Yifang  |e author 
700 1 0 |a Tao, Jiarui  |e author 
700 1 0 |a Zhao, Xinghong  |e author 
700 1 0 |a Cui, Zheng  |e author 
700 1 0 |a Schwanecke, Alexander S.  |e author 
700 1 0 |a Zheludev, Nikolay I.  |e author 
245 0 0 |a Nanoimprint lithography for planar chiral photonic meta-materials 
260 |c 2005-01-11. 
856 |z Get fulltext  |u https://eprints.soton.ac.uk/28739/1/chen-2005-nlp.pdf 
520 |a Room temperature nanoimprint lithography has successfully been applied to the fabrication of planar chiral photonic meta-materials. For dielectric chiral structures a single layer of thick HSQ was used while for metallic chiral structures a bi-layer technique using PMMA/hydrogen silsequioxane (HSQ) was applied. The polarization conversion capabilities of planar chiral structures imprinted in dielectric materials have experimentally been observed. This indicates that the developed processes in this work have the prospect of manufacturing planar photonic meta media in high volume at low cost. 
655 7 |a Article