Three mask polysilicon thin film transistor biosensor
Biosensors are commonly produced using a silicon-on-insulator (SOI) CMOS process and advanced lithography to define nanowires. In this paper, a simpler and cheaper junctionless three-mask process is investigated, which uses thin-film technology to avoid the use of SOI wafers, in situ doping to avoid...
| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2014-06.
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| Subjects: | |
| Online Access: | Get fulltext Get fulltext |