Highly linear and large spring deflection characteristics of a Quasi-Concertina MEMS device
In this work a Quasi-Concertina (QC) spring capable of a high linear range, large deflections, high out-of-plane compliance, and low in-plane compliance for MEMS applications is presented. These features are essential for high accuracy out-of-plane measurements such as those required in self-sensing...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2014-05-01.
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| Subjects: | |
| Online Access: | Get fulltext |