Locally erasable couplers for optical device testing in silicon on insulator
Wafer scale testing is critical to reducing production costs and increasing production yield. Here we report a method that allows testing of individual optical components within a complex optical integrated circuit. The method is based on diffractive grating couplers, fabricated using lattice damage...
| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2014-06-15.
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| Subjects: | |
| Online Access: | Get fulltext |