Effect of an oxide cap layer and fluorine implantation on the metal-induced lateral crystallization of amorphous silicon
In this work, we investigate the effect of oxide cap layer on the metal-induced lateral crystallization (MILC) of amorphous silicon. The MILC is characterized at temperatures in the range 550 to 428°C using Nomarski optical microscopy and Raman spectroscopy. It is shown that better lateral crystalli...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2012-12-07.
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| Subjects: | |
| Online Access: | Get fulltext |