Integrated optical dual-cantilever arrays in silica on silicon
A dual cantilever device has been demonstrated which can operate as a force sensor or variable attenuator. The device is fabricated using physical micromachining techniques that do not require cleanroom class facilities. The response of the device to mechanical actuation is measured, and shown to be...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2014.
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| Subjects: | |
| Online Access: | Get fulltext |