Silicon diffusion engineering in rapid melt growth of silicon-germanium on insulator
In this paper we focus on developing an efficient method to obtain a crystalline SiGe layer on top of an insulator. The method is aimed at enabling the fabrication of different concentration of crystalline SiGe alloy through structure engineering. This technique could enable the alloy composition to...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
2014-08-12.
|
| Subjects: | |
| Online Access: | Get fulltext |