A force sensor based on three weakly coupled resonators with ultrahigh sensitivity
A proof-of-concept force sensor based on three degree-of-freedom (DoF) weakly coupled resonators was fabricated using a silicon-on-insulator (SOI) process and electrically tested in 20 μTorr vacuum. Compared to the conventional single resonator force sensor with frequency shift as output, by measuri...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2015-08-01.
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| Subjects: | |
| Online Access: | Get fulltext |