Dopant profiling based on scanning electron and helium ion microscopy
In this paper, we evaluate and compare doping contrast generated inside the scanning electron microscope (SEM) and scanning helium ion microscope (SHIM). Specialised energy-filtering techniques are often required to produce strong doping contrast to map donor distributions using the secondary electr...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
2015-10-19.
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| Subjects: | |
| Online Access: | Get fulltext |