Spatially resolved TiO<sub>x</sub> phases in switched RRAM devices using soft X-ray spectromicroscopy
Reduction in metal-oxide thin films has been suggested as the key mechanism responsible for forming conductive phases within solid-state memory devices, enabling their resistive switching capacity. The quantitative spatial identification of such conductive regions is a daunting task, particularly fo...
| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2016-02-19.
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| Subjects: | |
| Online Access: | Get fulltext Get fulltext |