Silver-doped germanium sulphide glass channel waveguides fabricated by chemical vapour deposition and photo-dissolution process
Germanium sulphide glass thin films have been fabricated by chemical vapour deposition directly on commercial glass substrates. Silver (Ag)-doped channel waveguide structures were then prepared in a three step process, first channels were patterned in photo-resist, next a Ag thin film was deposited...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
2006.
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| Subjects: | |
| Online Access: | Get fulltext |