Fabrication of macroporous polysilicon by nanosphere lithography
The fabrication of ordered macroporous silicon is obtained by exploiting the self-assembly properties of polymer nanospheres. Here, we demonstrate the method by using nanospheres of 200nm and 500nm. These self-assemble in monolayers of ordered hexagonal close-packed nanospheres. A controlled reactiv...
Main Authors: | , |
---|---|
Format: | Article |
Language: | English |
Published: |
2008-05-15.
|
Subjects: | |
Online Access: | Get fulltext |