Fabrication of macroporous polysilicon by nanosphere lithography
The fabrication of ordered macroporous silicon is obtained by exploiting the self-assembly properties of polymer nanospheres. Here, we demonstrate the method by using nanospheres of 200nm and 500nm. These self-assemble in monolayers of ordered hexagonal close-packed nanospheres. A controlled reactiv...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
2008-05-15.
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| Subjects: | |
| Online Access: | Get fulltext |