Electron beam lithography for high density meta fish scale operational at optical frequency
This paper reports our recent progress in electron beam lithography for high resolution and highly dense metallic structures such as fish scale on both silicon and quartz. To observe photonic property in optical frequency, the pitch of 500 nm with both linewidth and gap of 50 nm gap in Al is demande...
| Main Authors: | , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
2009.
|
| Subjects: | |
| Online Access: | Get fulltext |