Ridge waveguides in lithium niobate fabricated by differential etching following spatially selective domain inversion
Ridge structures have been fabricated in z-cut LiNbO<sub>3</sub> using the technique of differential etching following spatially selective domain inversion. Waveguides within these ridges have been achieved using the techniques of ion beam implantation, proton exchange, and titanium indi...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
1999-03.
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| Subjects: | |
| Online Access: | Get fulltext |