In situ measurement of zinc oxide thin film thickness and optical losses
We report a simple and accurate interferometric method for simultaneous, in situ measurement of both the thickness and the depth resolved optical losses of thin transparent films. The experimental arrangement is simple, requiring only a laser and a detector regardless of the substrate. The originali...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
1995-07.
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| Subjects: | |
| Online Access: | Get fulltext |