Continuous flow supercritical chemical fluid deposition of optoelectronic quality CdS
Supercritical chemical fluid deposition (SCFD) has attracted considerable attention recently due to its ability to fill high aspect ratio templates. One technologically relevant example is the damascene process deposition of conformal low-resistivity copper interconnects within the latest generation...
| Main Authors: | , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2009-11.
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| Subjects: | |
| Online Access: | Get fulltext |