Etching and forward transfer of fused silica in solid-phase by femtosecond laser-induced solid etching (LISE)
We present a novel, laser-based microstructuring technique for the etching and deposition of solid materials. This technique, which we call laser-induced solid etching (LISE), utilises the absorption of femtosecond duration laser pulses in a constrained metal film between two bulk substrates, at lea...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
2009-07-30.
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| Subjects: | |
| Online Access: | Get fulltext |