Plasma diagnostic by optical emission spectroscopy on reactive magnetron sputtering plasma - A Brief Introduction
Optical emission spectroscopy has been employed as noninvasive plasma diagnostics method and it is to detect the light emission during titanium nitride deposition using magnetron sputtering plasma discharge. The optical emission from argon and titanium were used to observe the ionization ratio of ea...
| Main Authors: | , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
2018
|
| Subjects: | |
| Online Access: | View Fulltext in Publisher |