EVALUATION ON THE EGFET PH SENSING PERFORMANCE OF SOL-GEL SPIN COATED TITANIUM DIOXIDE THIN FILM

EVALUATION ON THE EGFET PH SENSING PERFORMANCE OF SOL-GEL SPIN COATED TITANIUM DIOXIDE THIN FILM

Show other versions (1)

For this study, TiO2 thin film was fabricated using sol-gel spin coating method. The fabricated film was then applied as sensing membrane in an extended gate field effect transistor (EGFET) pH sensor system. The pH sensing performance of the sol-gel spin coated TiO2 were evaluated in terms of sensit...

Full description

Bibliographic Details
Main Authors: Abdullah, WFH (Author), Herman, SH (Author), Rahman, RA (Author), Rosli, AB (Author), Yusof, KA (Author), Zulkefle, MA (Author), Zulkifli, Z (Author)
Format: Article
Language:English
Published: 2021
Subjects:
DRIFT
EGFET
pH sensors
sol-gel spin coating
thickness
thin films
titanium dioxide
Online Access:View Fulltext in Publisher

Internet

View Fulltext in Publisher

Similar Items