Gold-Catalyzed Growth of Aluminium-Doped Zinc Oxide Nanorods by Sputtering Method

Aluminium-doped zinc oxide (AZO) nanorods thin films were grown by RF magnetron sputtering on gold (Au) metal catalyst. The Au catalyst layers with 5, 10, and 15 nm thickness were deposited on glass substrates by sputtering method followed by annealing for 15 min at 500 degrees C to form Au nanostru...

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Bibliographic Details
Main Authors: Ani, MH (Author), Herman, SH (Author), Marbie, MM (Author), Rosli, AB (Author)
Format: Article
Language:English
Online Access:View Fulltext in Publisher