Investigation on the Effect of Direct Current and Integrated Pulsed Electrochemical Etching of n-Type (100) Silicon
This paper investigates the effects of different etching techniques between direct current electrochemical etching (DCPEC) and integrated pulsed electrochemical etching (iPEC) on the structural and optical characteristics of porous silicon formation. The n -type Si (100) was fabricated using both te...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
2019
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Subjects: | |
Online Access: | View Fulltext in Publisher |