Fabrication of multilayer-PDMS based microfluidic device for bio-particles concentration detection
This paper discusses the process technology to fabricate multilayer-Polydimethylsiloxane (PDMS) based microfluidic device for bio-particles concentration detection in Lab-on-chip system. The micro chamber and the fluidic channel were fabricated using standard photolithography and soft lithography pr...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Online Access: | View Fulltext in Publisher |