Optimization of Nano-Process Deposition Parameters Based on Gravitational Search Algorithm
This research is focusing on the radio frequency (RF) magnetron sputtering process, a physical vapor deposition technique which is widely used in thin film production. This process requires the optimized combination of deposition parameters in order to obtain the desirable thin film. The conventiona...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2016
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |