Surface Modification of Electroosmotic Silicon Microchannel Using Thermal Dry Oxidation
A simple fabrication method for the surface modification of an electroosmotic silicon microchannel using thermal dry oxidation is presented. The surface modification is done by coating the silicon surface with a silicon dioxide (SiO2) layer using a thermal oxidation process. The process aims not onl...
| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
2018
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| Subjects: | |
| Online Access: | View Fulltext in Publisher |