Nitrogen Incorporation of Nanostructured Amorphous Carbon Thin Films by Aerosol-Assisted Chemical Vapor Deposition
Nanostructured pure a-C and nitrogen doped a-C: N thin films with small particle size of, similar to 50 nm were obtained by Aerosol-assisted CVD method from the natural precursor camphor oil. Five samples were prepared for the a-C and a-C: N respectively, with the deposition temperatures ranging fro...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Online Access: | View Fulltext in Publisher |