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ELECTRICAL ENGINEER IN SOCIETY
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Berggren, Karl K.
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Manfrinato, Vitor Riseti
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Search Results - ELECTRICAL ENGINEER IN SOCIETY
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ELECTRICAL ENGINEER IN SOCIETY
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1
Resolution Limits of Electron-Beam Lithography toward the Atomic Scale
by
Zhang, Lihua
,
Su, Dong
,
Duan, Huigao
,
Stach, Eric A.
,
Berggren, Karl K.
,
Manfrinato, Vitor Riseti
,
Hobbs, Richard
Published 2015
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2
Neon Ion Beam Lithography (NIBL)
by
Winston, Donald
,
Manfrinato, Vitor Riseti
,
Nicaise, Samuel M.
,
Cheong, Lin Lee
,
Duan, Huigao
,
Ferranti, David
,
Marshman, Jeff
,
McVey, Shawn
,
Stern, Lewis
,
Notte, John
,
Berggren, Karl K.
Published 2012
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3
Metrology for electron-beam lithography and resist contrast at the sub-10 nm scale
by
Duan, Huigao
,
Manfrinato, Vitor Riseti
,
Yang, Joel K. W.
,
Winston, Donald
,
Cord, Bryan M.
,
Berggren, Karl K.
Published 2012
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4
Sub-10-nm half-pitch electron-beam lithography by using poly(methyl methacrylate) as a negative resist
by
Berggren, Karl K.
,
Duan, Huigao
,
Winston, Donald
,
Yang, Joel K. W.
,
Cord, Bryan M.
,
Manfrinato, Vitor Riseti
Published 2012
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4
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4
Author
Berggren, Karl K.
Duan, Huigao
4
Manfrinato, Vitor Riseti
Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science
4
Winston, Donald
3
Cord, Bryan M.
2
Yang, Joel K. W.
2
Cheong, Lin Lee
1
Ferranti, David
1
Hobbs, Richard
1
Marshman, Jeff
1
Massachusetts Institute of Technology. Research Laboratory of Electronics
1
McVey, Shawn
1
Nicaise, Samuel M.
1
Notte, John
1
Stach, Eric A.
1
Stern, Lewis
1
Su, Dong
1
Zhang, Lihua
1
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English
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