Low-cost interference lithography

by Fucetola, Corey P., Korre, Hasan, Berggren, Karl K.
Published 2012

Intrinsic Timing Jitter and Latency in Superconducting Nanowire Single-photon Detectors

by Allmaras, J.P, Kozorezov, A.G, Korzh, B.A, Berggren, Karl K., Shaw, M.D
Published 2019

Smith-Purcell Radiation from Low-Energy Electrons

by Massuda, Aviram, Roques-Carmes, Charles, Yang, Yujia, Kooi, Steven E., Yang, Yi, Murdia, Chitraang, Berggren, Karl K., Kaminer, Ido, Soljacic, Marin
Published 2020

Limiting factors in sub-10 nm scanning-electron-beam lithography

by Berggren, Karl K., Cord, Bryan M., Yang, Joel K. W., Duan, Huigao, Joy, David C., Klingfus, Joseph
Published 2012

Aligned Sub-10-nm Block Copolymer Patterns Templated by Post Arrays

by Chang, Jae-Byum, Son, Jeong Gon, Hannon, Adam F., Alexander-Katz, Alfredo, Ross, Caroline A., Berggren, Karl K.
Published 2013

Assembly of Sub-10-nm Block Copolymer Patterns with Mixed Morphology and Period Using Electron Irradiation and Solvent Annealing

by Son, Jeong Gon, Chang, Jae-Byum, Berggren, Karl K., Ross, Caroline A.
Published 2013

Eight-fold signal amplification of a superconducting nanowire single-photon detector using a multiple-avalanche architecture

by Zhao, Qingyuan, McCaughan, Adam N., Najafi, Faraz, Bellei, Francesco, De Fazio, Domenico, Sunter, Kristen A., Ivry, Yachin, Berggren, Karl K., Dane, Andrew Edward
Published 2015

Metrology for electron-beam lithography and resist contrast at the sub-10 nm scale

by Duan, Huigao, Manfrinato, Vitor Riseti, Yang, Joel K. W., Winston, Donald, Cord, Bryan M., Berggren, Karl K.
Published 2012

In situ study of hydrogen silsesquioxane dissolution rate in salty and electrochemical developers

by Harry, Katherine J., Strobel, Sebastian, Yang, Joel K. W., Duan, Huigao, Berggren, Karl K.
Published 2013

Development of a simple, compact, low-cost interference lithography system

by Korre, Hasan, Fucetola, Corey P., Johnson, Jeremiah A., Berggren, Karl K.
Published 2012

High-order temporal coherences of chaotic and laser light

by Stevens, Martin J., Baek, Burm, Dauler, Eric A., Kerman, Andrew J., Molnar, Richard J., Hamilton, Scott A., Berggren, Karl K., Mirin, Richard P., Nam, Sae Woo
Published 2010

Numerical method to optimize the polar-azimuthal orientation of infrared superconducting-nanowire single-photon detectors

by Csete, Maria, Sipos, Áron, Najafi, Faraz, Hu, Xiaolong, Berggren, Karl K.
Published 2012

Sub-10-nm half-pitch electron-beam lithography by using poly(methyl methacrylate) as a negative resist

by Berggren, Karl K., Duan, Huigao, Winston, Donald, Yang, Joel K. W., Cord, Bryan M., Manfrinato, Vitor Riseti
Published 2012

Templated self-assembly of Si-containing block copolymers for nanoscale device fabrication

by Ross, Caroline A., Manners, I., Gwyther, J., Jung, Yeon Sik, Chuang, Vivian Peng-Wei, Son, Jeong Gon, Gotrik, Kevin W., Mickiewicz, R. A., Yang, Joel K. W., Chang, J. B., Berggren, Karl K.
Published 2010

Superconducting nanowire single-photon detectors integrated with optical nano-antennae

by Hu, Xiaolong, Dauler, Eric A., Molnar, Richard J., Berggren, Karl K.
Published 2012

Large-area NbN superconducting nanowire avalanche photon detectors with saturated detection efficiency

by Murphy, Ryan P., Grein, Matthew E., Gudmundsen, Theodore J., Najafi, Faraz, Berggren, Karl K., Marsili, Francesco, Dauler, Eric A., McCaughan, Adam N.
Published 2015

Universal scaling of the critical temperature for thin films near the superconducting-to-insulating transition

by Ivry, Yachin, Kim, Chung-Soo, De Fazio, Domenico, McCaughan, Adam N., Sunter, Kristen A., Zhao, Qingyuan, Berggren, Karl K., Dane, Andrew Edward
Published 2014