CMOS integrated circuits 1 Complementary metal-oxide-semiconductor 1 Compromized gate dielectric 1 Design-process 1 Dielectric devices 1 Gate dielectrics 1 Integrated circuit Integrated circuit design 1 Local oxidation 1 Local oxidation of SiC isolation 1 MOS devices 1 MOSFET devices 1 Metallic compounds 1 Metals 1 Oxide semiconductors 1 Performance 1 Process flows 1 Semiconducting silicon 1 SiC 1 Silicon carbide 1 Static random access memory 1 Static random access storage 1 Static random-access memory 1 Substrates 1 Threshold voltage 1 Timing circuits 1 Wide band gap semiconductors 1 complementary metal-oxide-semiconductor (CMOS) 1 compromised gate dielectric 1 integrated circuit (IC) 1