CMOS integrated circuits Complementary metal-oxide-semiconductor Compromized gate dielectric Design-process Dielectric devices Gate dielectrics Integrated circuit Integrated circuit design Local oxidation Local oxidation of SiC isolation MOS devices MOSFET devices Metallic compounds Metals Oxide semiconductors Performance Process flows Semiconducting silicon SiC Silicon carbide Static random access memory Static random access storage Static random-access memory Substrates Threshold voltage Timing circuits Wide band gap semiconductors complementary metal-oxide-semiconductor (CMOS) compromised gate dielectric integrated circuit (IC)