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Ion implantation
Ions implantation
3
3D graphene
1
Activation energy
1
Antimony compounds
1
Atomic force
1
B-y Ions
1
Beam-columns
1
Bismuth compounds
1
Condition
1
Cyclotrons
1
Desorption
1
Electron cyclotron resonance
1
End-of-range defects
1
Epitaxial silicon
1
Focused ion beams
1
Focused ions beams
1
Gold
1
Heat treatment
1
High resolution transmission electron microscopy
1
Image enhancement
1
Image resolution
1
In-situ transmission electron microscopies
1
Inversion symmetry
1
Ion implanted
1
Ion sources
1
Lows-temperatures
1
Molecular ion implantation
1
Multiply charged
1
Nano scale
1
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1
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3by Been, T., Birou, T., Bourin, C., Cassimi, A., Delobbe, A., Guillous, S., Houel, A., Keizer, A., Lalande, M., Mellier, J.-B, Ramillon, J.-M, Salou, P., Sineau, A.View Fulltext in Publisher
Published 2022
Article