Suggested Topics within your search.
Suggested Topics within your search.
Silicon wafers
Substrates
4
Fabrication
3
Silicon carbide
3
Thin films
3
Amorphous silicon
2
Electrodes
2
MEMS
2
On-wafer
2
Optical properties
2
Photonic devices
2
Scanning electron microscopy
2
Semiconductor materials
2
Silicon compounds
2
Silicon photonics
2
Silicon solar cells
2
Silicon substrates
2
Transducers
2
Wafer bonding
2
3-axis sensing
1
300 mm wafers
1
Accelerometers
1
Activation energy
1
Amorphous Si
1
Aqua Regia
1
Aqua regia
1
Atmospheric temperature
1
Auger recombination
1
Band-stop filters
1
BiCMOS technology
1
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15by Bickermann, M., Bin Anooz, S., Chou, T.-S, Dittmar, A., Galazka, Z., Ganschow, S., Grueneberg, R., Irmscher, K., Klimm, D., Kwasniewski, A., Pietsch, M., Popp, A., Schroeder, T., Seyidov, P., Straubinger, T., Suendermann, M.View Fulltext in Publisher
Published 2022
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20by Aldrigo, M., Cismaru, A., Dragoman, M., Iordanescu, S., Joseph, H.C, Mencarelli, D., Mladenovic, D., Parvulescu, C., Pierantoni, L., Russo, P., Zappelli, L.View Fulltext in Publisher
Published 2023
Article