X ray photoelectron spectroscopy X-ray photoelectrons 2 Alumina 1 Aluminum oxide 1 Aspect ratio 1 Atomic layer deposition 1 Atomic layer etching 1 Atomic-layer deposition 1 Atoms 1 Charge state 1 Cluster ion beams 1 Different sizes 1 Drops 1 Electrospray droplets 1 Electrospraying 1 Etch rates 1 Etching 1 Etching process 1 Fluorine compounds 1 Hafnium oxides 1 In-Situ Study 1 Ion beam technique 1 Ion beams 1 Ion bombardment 1 Ions 1 Oxide films 1 Performance 1 Photoelectrons 1 Photoionization 1 Photons 1