Showing
1 - 1
results of
1
for search '
Knaut, M.
'
Skip to content
Home
High Impact Articles
Search Options
UiTM Open Access
Search by UiTM Scopus
Advanced Search
Search by Category
Discovery Service
Sources
Jawi Collection
UiTM Journals
List UiTM Journal in IR
Statistic
About
Open Access
Creative Commons Licenses
COKI | Malaysia Open Access
Report Technical
User Guide
Contact Us
Search Tips
FAQs
All Fields
Title
Author
Subject
Call Number
ISBN/ISSN
Tag
Find
Advanced
Author
Knaut, M.
Showing
1 - 1
results of
1
for search '
Knaut, M.
'
, query time: 0.03s
Refine Results
Sort
Relevance
Date Descending
Date Ascending
Call Number
Author
Title
1
In situ studies on atomic layer etching of aluminum oxide using sequential reactions with trimethylaluminum and hydrogen fluoride
by
Albert, M.
,
Bartha, J.W
,
Killge, S.
,
Knaut
,
M
.
,
Mikolajick, T.
,
Reif, J.
Published 2022
Call Number:
Loading...
Located:
Loading...
View Fulltext in Publisher
Article
Search Tools:
Get RSS Feed
—
Email this Search
Related Subjects
Alumina
Aluminum oxide
Aspect ratio
Atomic layer deposition
Atomic layer etching
Atomic-layer deposition
Atoms
Etch rates
Etching
Etching process
Fluorine compounds
Hafnium oxides
In-Situ Study
Oxide films
Photoelectrons
Photons
Process pressure
Semiconductor devices
Sequential reaction
Spectroscopic analysis
Spectroscopic ellipsometry
Surface reactions
Temperature distribution
Thin films
Thin-films
Trimethylaluminum
X ray photoelectron spectroscopy
X-ray photoelectrons
Loading...