Atomic layer etching Atoms 2 Etching 2 Semiconductor devices 2 Alumina 1 Aluminum oxide 1 Aspect ratio 1 Atomic layer 1 Atomic layer deposition 1 Atomic-layer deposition 1 Epitaxial lift-off techniques 1 Etch rates 1 Etching process 1 Fluorine compounds 1 Graphene 1 Graphene layers 1 Hafnium oxides 1 Higher yield 1 In-Situ Study 1 Layer by layer 1 Lift offs 1 Oxide films 1 Photoelectrons 1 Photons 1 Process pressure 1 Sequential reaction 1 Single crystalline substrates 1 Single crystals 1 Single-crystalline 1 Spectroscopic analysis 1