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Yeom, G.Y
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Yeom, G.Y
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Atomic layer-by-layer etching of graphene directly grown on SrTiO3substrates for high-yield remote epitaxy and lift-off
by
Chen, P.
,
Ji, J.
,
Kang, J.E
,
Kim, J.
,
Kim, K.S
,
Kim, S.
,
Kum, H.S
,
Yeom
,
G.Y
Published 2022
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Related Subjects
Atomic layer
Atomic layer etching
Atoms
Epitaxial lift-off techniques
Etching
Graphene
Graphene layers
Higher yield
Layer by layer
Lift offs
Semiconductor devices
Single crystalline substrates
Single crystals
Single-crystalline
Strontium titanates
Substrates
Titanium compounds
Ultra-thin
Ultrathin films
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