Active Learning 1 Chemical-mechanical planarization process 1 Clustering algorithms 1 Deep kernel learning 1 Deep learning 1 E-learning 1 Gaussian distribution 1 Gaussian noise (electronic) 1 Information use 1 Kernel learning 1 Learning algorithms 1 Learning systems 1 Material removal rate 1 Mean square error 1 Phase match 1 Phase matching 1 Phase partition 1 Principal component analysis 1 Regression analysis 1 Semi-supervised 1 Semi-supervised regression 1 Virtual metrology 1 active learning 1 algorithm 1 article 1 controlled study 1 deep kernel learning 1 feature extraction 1 learning 1 mean squared error 1