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Showing 1 - 20 results of 308 for search '"Surface micromachining"', query time: 2.91s Refine Results
  1. 1
    Surface micromachined hollow metallic microneedles
    by Chandrasekaran, Shankar
    Published 2007
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  2. 2
    Surface Micromachining Capacitive Ultrasonic Transducers
    by Chia-Hung Liu, 劉嘉洪
    Published 2008
    “... the full surface micromachining techniques of the Micro Electro Mechanical System (MEMS), which...”
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  3. 3
    Surface micromachined piezoresistive pressure sensor
    by Chu,Huey-Chi, 朱惠祺
    Published 1996
    “...碩士 === 國立臺灣大學 === 應用力學研究所 === 84 === Surface micromachined piezoresistive pressure...”
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  4. 4
    The fabrication of capacitive accelerometer by surface micromachining
    by Chen, Ching-Feng, 陳慶蘴
    Published 1998
    “...-electro-mechanical systems (MEMS). There are surface-micromachining and bulk-micromachining...”
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  5. 5
    Application of Gelatin Material in Surface Micromachining
    by Wei-Chih Lin, 林韋至
    Published 2002
    “..., gelatin, to the processes newly developed in surface micromachining with the characteristics of low...”
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  6. 6
    Surface Micromachined Vertically Driven Actuator
    by Lin, Shiao Hong, 林曉宏
    Published 1997
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  7. 7
    Design and Characterization of Surface Micromachining Tunable Capacitor
    by Han-Cheng Tsai, 蔡漢城
    Published 2007
    “... and wide-tuning-range using surface micromachining. In contrast with conventional low-tuning-rate parallel...”
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  8. 8
    Modeling and Control of Surface Micromachined Thermal Actuators
    by Messenger, Robert K.
    Published 2004
    “... feedback control on surface micromachined MEMS devices. The inherent difficulties in sensing microscale...”
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  9. 9
    A Study of Surface Micromachined Tunable Capacitor
    by Chih-Sheng Huang, 黃智聖
    Published 2005
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  10. 10
    Design and Electromechanical Analysis of Surface-Micromachined Tunable Capacitor
    by Che-Ya Chou, 周哲雅
    Published 2007
    “...碩士 === 國立中山大學 === 電機工程學系研究所 === 95 === This paper aims to design and simulate the surface...”
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  11. 11
    Dual-stage Thermally Actuated Surface-Micromachined Nanopositioners
    by Hubbard, Neal B.
    Published 2005
    “... to analyze the mechanical behavior of the devices. The nanopositioners were surface micromachined in a two...”
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  12. 12
    A Surface Micromachined CMOS MEMS Humidity Sensor
    by Jian-Qiu Huang, Fei Li, Min Zhao, Kai Wang
    Published 2015-10-01
    “... system) piezoresistive humidity sensor fabricated by a surface micromachining process. Both pre-CMOS...”
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    Article
  13. 13
    Fabrication of Micro Actuators by Metal-Based Surface Micromachining
    by Tingsin Liao, 廖挺欣
    Published 2002
    “...碩士 === 國立交通大學 === 機械工程系 === 90 === Here, a metal-based surface micromachining technology...”
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  14. 14
    A surface micromachined cantilever beam rotation sensor.
    Published 1999
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  15. 15
    Silver nanoparticle structures realized by digital surface micromachining
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    Article
  16. 16
    Analysis and Design of Surface Micromachined Micromanipulators for Out-of-Plane Micropositioning
    by Jensen, Kimberly A.
    Published 2003
    Subjects: “...surface micromachining...”
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  17. 17
    Electrothermomechanical Modeling of a Surface-micromachined Linear Displacement Microactuator
    by Lott, Christian D.
    Published 2005
    “... Thermomechanical In-plane Microactuator, or TIM, and was fabricated with surface micromachining technology. A TIM...”
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  18. 18
    Development of a Surface Micromachined On-Chip Flat Disk Micropump
    Subjects: “...surface micromachining...”
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    Article
  19. 19
    Using Surface Micromachining Implement Single Cell Biochip Platform
    by Yan-chih Lu, 盧彥池
    Published 2007
    “..., and replace bulk micromachining process by surface micromachining like process to raise filed, hence this chip...”
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  20. 20
    An Applicabability Study On Using Surface Micromachining Techniques In Manufacuring Micromechanisms
    by Wang, Kai-Lu, 王凱魯
    Published 1994
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