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  1. 1
    Diffraction-based integrated optical readout for micromachined optomechanical sensors
    by Lee, Wook
    Published 2007
    Subjects: “...Microelectromechanical systems (MEMS)...”
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  2. 2
    Miniaturized Optical Resolution Photoacoustic Microscope Based on a Microelectromechanical Systems Scanning Mirror
    by Weizhi Qi, Qian Chen, Heng Guo, Huikai Xie, Lei Xi
    Published 2018-06-01
    Subjects: “...microelectromechanical systems (MEMS)...”
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    Article
  3. 3
    Design, Fabrication and Failure Analysis of Stretchable Electrical Routings
    by Hong Hocheng, Chao-Ming Chen
    Published 2014-07-01
    Subjects: “...microelectromechanical systems (MEMS)...”
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    Article
  4. 4
    Novel Fabrication Process for Integration of Microwave Sensors in Microfluidic Channels
    Subjects: “...microelectromechanical systems (mems)...”
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    Article
  5. 5
    Micro-optical Components for Bioimaging on Tissues, Cells and Subcellular Structures
    by Hui Yang, Yi Zhang, Sihui Chen, Rui Hao
    Published 2019-06-01
    Subjects: “...microelectromechanical systems (MEMS)...”
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    Article
  6. 6
    Mini and Micro Propulsion for Medical Swimmers
    by JianFeng, Sung Kwon Cho
    Published 2014-02-01
    Subjects: “...microelectromechanical systems (MEMS)...”
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    Article
  7. 7
    Design Issues for MEMS-Based Pedestrian Inertial Navigation Systems
    Subjects: “...microelectromechanical systems (MEMS)...”
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  8. 8
    Analysis of the Failure and Performance Variation Mechanism of MEMS Suspended Inductors with Auxiliary Pillars under High-g Shock
    by Lixin Xu, Yiyuan Li, Jianhua Li
    Published 2020-10-01
    Subjects: “...microelectromechanical systems (MEMS) suspended inductor...”
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    Article
  9. 9
    3D Printed MEMS Technology—Recent Developments and Applications
    by Tomasz Blachowicz, Andrea Ehrmann
    Published 2020-04-01
    Subjects: “...microelectromechanical systems (MEMS)...”
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    Article
  10. 10
    Programmable Low-Power Low-Noise Capacitance to Voltage Converter for MEMS Accelerometers
    Subjects: “...microelectromechanical systems (MEMS)...”
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    Article
  11. 11
    Resonant Magnetic Field Sensors Based On MEMS Technology
    Subjects: “...Microelectromechanical Systems (MEMS)...”
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    Article
  12. 12
    Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope
    Subjects: “...microelectromechanical systems (MEMS)...”
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    Article
  13. 13
    A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope
    Subjects: “...microelectromechanical systems (MEMS)...”
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    Article
  14. 14
    An overview of microneedle applications, materials, and fabrication methods
    Subjects: “...microelectromechanical systems (mems)...”
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    Article
  15. 15
    Multi-Constriction Microfluidic Sensors for Single-Cell Biophysical Characterization
    by Ghassemi, Parham
    Published 2019
    Subjects: “...Microelectromechanical Systems(MEMS)...”
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  16. 16
    Phase Noise Reduction in a VHF MEMS-CMOS Oscillator Using Phononic Crystals
    by Pei Qin, Haoshen Zhu, Joshua E.-Y. Lee, Quan Xue
    Published 2016-01-01
    Subjects: “...Microelectromechanical Systems (MEMS),...”
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    Article
  17. 17
    MEMS-Based Tunable Linear-Cavity Fiber Laser
    by David Michel, Feng Xiao, Kamal Alameh
    Published 2012-01-01
    Subjects: “...microelectromechanical systems (MEMS)...”
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    Article
  18. 18
    A New Time–Frequency Feature Extraction Method for Action Detection on Artificial Knee by Fractional Fourier Transform
    by Tianrun Wang, Ning Liu, Zhong Su, Chao Li
    Published 2019-05-01
    Subjects: “...microelectromechanical systems (MEMS)...”
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    Article
  19. 19
    Design, Simulation and Fabrication of A Novel MEMS Based Pulsometer
    Subjects: “...microelectromechanical systems (MEMS)...”
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    Article
  20. 20
    Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection
    Subjects: “...microelectromechanical systems (MEMS)...”
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    Article
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