Technology: general issues 6 Physical vapor deposition 5 History of engineering and technology 4 Silicon 3 Materials science 2 Physical vapour deposition 2 Silicon substrates 2 Substrates 2 physical vapor deposition 2 Additive manufacturing 1 Amorphous carbon 1 Biosensors 1 Catalysts 1 Chemical vapor deposition 1 Compressive strain 1 Diamond like carbon 1 Diamonds 1 Direct-patterning 1 Domain walls 1 Energy dispersive x-ray spectrometers 1 Energy gap 1 Etching 1 Ferroelectric domains 1 Ferroelectric layers 1 Ferroelectric materials 1 Ferroelectric stacking 1 Ferroelectricity 1 Ferroelectrics materials 1 Field effect transistors 1 Field-effect transistor 1