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Thin-films
Alumina
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Aluminum oxide
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Aspect ratio
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Etching
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Substrates
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Thin films
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Aluminum nitride
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Atomic layer deposition
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Atomic layer etching
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Atomic-layer deposition
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Atoms
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BN films
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Boron nitride
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Boron nitride films
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Chemical vapor deposition
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Chemical vapor deposition process
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Chemical vapour deposition
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Crystalline films
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Deformation
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Diffractograms
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Electrochemistry
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Electroforming
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Electrometallurgy
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Etch rates
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Etching process
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Fluorine compounds
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Fourier transform infrared spectroscopy
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Hafnium oxides
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High aspect ratio
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1by Baba, H., Fukuyama, S., Ihara, T., Iwatsuki, M., Kitamura, Y., Kumamoto, S., Nagano, S., Nakanishi, Y., Nakashima, Y., Yasuda, K.Subjects: “...Semiconductor process technology...”
Published 2022
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