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Akira Uedono
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Akira Uedono
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Akira Uedono
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1
Material design of plasma-enhanced chemical vapour deposition SiCH films for low-k cap layers in the further scaling of ultra-large-scale integrated devices-Cu interconnects
by
Hideharu Shimizu, Shuji Nagano,
Akira
Uedono
, Nobuo Tajima, Takeshi Momose and Yukihiro Shimogaki
Published 2013-01-01
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Article
2
Investigation of Al2O3/GaN interface properties by sub-bandgap photo-assisted capacitance-voltage technique
by
Yoshihiro Irokawa
,
Toshihide Nabatame
,
Kazuya Yuge
,
Akira
Uedono
,
Akihiko Ohi
,
Naoki Ikeda
,
Yasuo Koide
Published 2019-08-01
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