3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI

by Wenjuan Liu, Leming He, Xubo Wang, Jia Zhou, Weijiang Xu, Nikolay Smagin, Malika Toubal, Hao Yu, Yuandong Gu, Jinghui Xu, Denis Remiens, Junyan Ren
Published 2019-10-01