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Leming He
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3D FEM Analysis of High-Frequency AlN-Based PMUT Arrays on Cavity SOI
by
Wenjuan Liu
,
Leming
He
,
Xubo Wang
,
Jia Zhou
,
Weijiang Xu
,
Nikolay Smagin
,
Malika Toubal
,
Hao Yu
,
Yuandong Gu
,
Jinghui Xu
,
Denis Remiens
,
Junyan Ren
Published 2019-10-01
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