Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System

Design, Fabrication, and Implementation of an Array-Type MEMS Piezoresistive Intelligent Pressure Sensor System

To meet the radiosonde requirement of high sensitivity and linearity, this study designs and implements a monolithically integrated array-type piezoresistive intelligent pressure sensor system which is made up of two groups of four pressure sensors with the pressure range of 0–50 kPa and 0–100 kPa r...

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Bibliographic Details
Main Authors: Jiahong Zhang, Jianxiang Chen, Min Li, Yixian Ge, Tingting Wang, Peng Shan, Xiaoli Mao
Format: Article
Language:English
Published: MDPI AG 2018-02-01
Series:Micromachines
Subjects:
MEMS pressure sensor
array-type
intelligent sensor system
genetic algorithm wavelet neural network (GA-WNN)
sensitivity
nonlinear error
temperature drift
hysteresis compensation
Online Access:http://www.mdpi.com/2072-666X/9/3/104

Internet

http://www.mdpi.com/2072-666X/9/3/104

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