Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry

Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry

An existing phase-locked-loop (PLL) based contact-resonance measurement system is studied and optimized. Improvements to the electronics’ circuit to reduce both nonlinear behavior and noise are realized and experimentally tested. The improvements enable to analyze signals even at highly damped vibra...

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Bibliographic Details
Main Authors: Michael Fahrbach, Linus Krieg, Tobias Voss, Maik Bertke, Jiushuai Xu, Erwin Peiner
Format: Article
Language:English
Published: MDPI AG 2018-11-01
Series:Proceedings
Subjects:
contact resonance spectroscopy
layer analysis
piezoresistive
tactile cantilever
automatic gain control
phase-locked-loop
Online Access:https://www.mdpi.com/2504-3900/2/13/889

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https://www.mdpi.com/2504-3900/2/13/889

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